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Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions
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| Zeitschriftentitel: | Semiconductors |
|---|---|
| Personen und Körperschaften: | , |
| In: | Semiconductors, 48, 2014, 6, S. 828-837 |
| Format: | E-Article |
| Sprache: | Englisch |
| veröffentlicht: |
Pleiades Publishing Ltd
|
| Schlagwörter: |
| author_facet |
Ivina, N. L. Orlov, L. K. Ivina, N. L. Orlov, L. K. |
|---|---|
| author |
Ivina, N. L. Orlov, L. K. |
| spellingShingle |
Ivina, N. L. Orlov, L. K. Semiconductors Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions Condensed Matter Physics Atomic and Molecular Physics, and Optics Electronic, Optical and Magnetic Materials |
| author_sort |
ivina, n. l. |
| spelling |
Ivina, N. L. Orlov, L. K. 1063-7826 1090-6479 Pleiades Publishing Ltd Condensed Matter Physics Atomic and Molecular Physics, and Optics Electronic, Optical and Magnetic Materials http://dx.doi.org/10.1134/s106378261406013x Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions Semiconductors |
| doi_str_mv |
10.1134/s106378261406013x |
| facet_avail |
Online |
| finc_class_facet |
Physik Technik |
| format |
ElectronicArticle |
| fullrecord |
blob:ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMTEzNC9zMTA2Mzc4MjYxNDA2MDEzeA |
| id |
ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMTEzNC9zMTA2Mzc4MjYxNDA2MDEzeA |
| institution |
DE-105 DE-14 DE-Ch1 DE-L229 DE-D275 DE-Bn3 DE-Brt1 DE-D161 DE-Gla1 DE-Zi4 DE-15 DE-Pl11 DE-Rs1 |
| imprint |
Pleiades Publishing Ltd, 2014 |
| imprint_str_mv |
Pleiades Publishing Ltd, 2014 |
| issn |
1063-7826 1090-6479 |
| issn_str_mv |
1063-7826 1090-6479 |
| language |
English |
| mega_collection |
Pleiades Publishing Ltd (CrossRef) |
| match_str |
ivina2014featuresofthetwocomponentdecompositionofmonosilanemoleculesonasiliconsurfaceunderepitaxialprocessconditions |
| publishDateSort |
2014 |
| publisher |
Pleiades Publishing Ltd |
| recordtype |
ai |
| record_format |
ai |
| series |
Semiconductors |
| source_id |
49 |
| title |
Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| title_unstemmed |
Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| title_full |
Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| title_fullStr |
Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| title_full_unstemmed |
Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| title_short |
Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| title_sort |
features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| topic |
Condensed Matter Physics Atomic and Molecular Physics, and Optics Electronic, Optical and Magnetic Materials |
| url |
http://dx.doi.org/10.1134/s106378261406013x |
| publishDate |
2014 |
| physical |
828-837 |
| description |
|
| container_issue |
6 |
| container_start_page |
828 |
| container_title |
Semiconductors |
| container_volume |
48 |
| format_de105 |
Article, E-Article |
| format_de14 |
Article, E-Article |
| format_de15 |
Article, E-Article |
| format_de520 |
Article, E-Article |
| format_de540 |
Article, E-Article |
| format_dech1 |
Article, E-Article |
| format_ded117 |
Article, E-Article |
| format_degla1 |
E-Article |
| format_del152 |
Buch |
| format_del189 |
Article, E-Article |
| format_dezi4 |
Article |
| format_dezwi2 |
Article, E-Article |
| format_finc |
Article, E-Article |
| format_nrw |
Article, E-Article |
| _version_ |
1792320763142864902 |
| geogr_code |
not assigned |
| last_indexed |
2024-03-01T10:51:17.927Z |
| geogr_code_person |
not assigned |
| openURL |
url_ver=Z39.88-2004&ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fvufind.svn.sourceforge.net%3Agenerator&rft.title=Features+of+the+two-component+decomposition+of+monosilane+molecules+on+a+silicon+surface+under+epitaxial-process+conditions&rft.date=2014-06-01&genre=article&issn=1090-6479&volume=48&issue=6&spage=828&epage=837&pages=828-837&jtitle=Semiconductors&atitle=Features+of+the+two-component+decomposition+of+monosilane+molecules+on+a+silicon+surface+under+epitaxial-process+conditions&aulast=Orlov&aufirst=L.+K.&rft_id=info%3Adoi%2F10.1134%2Fs106378261406013x&rft.language%5B0%5D=eng |
| SOLR | |
| _version_ | 1792320763142864902 |
| author | Ivina, N. L., Orlov, L. K. |
| author_facet | Ivina, N. L., Orlov, L. K., Ivina, N. L., Orlov, L. K. |
| author_sort | ivina, n. l. |
| container_issue | 6 |
| container_start_page | 828 |
| container_title | Semiconductors |
| container_volume | 48 |
| description | |
| doi_str_mv | 10.1134/s106378261406013x |
| facet_avail | Online |
| finc_class_facet | Physik, Technik |
| format | ElectronicArticle |
| format_de105 | Article, E-Article |
| format_de14 | Article, E-Article |
| format_de15 | Article, E-Article |
| format_de520 | Article, E-Article |
| format_de540 | Article, E-Article |
| format_dech1 | Article, E-Article |
| format_ded117 | Article, E-Article |
| format_degla1 | E-Article |
| format_del152 | Buch |
| format_del189 | Article, E-Article |
| format_dezi4 | Article |
| format_dezwi2 | Article, E-Article |
| format_finc | Article, E-Article |
| format_nrw | Article, E-Article |
| geogr_code | not assigned |
| geogr_code_person | not assigned |
| id | ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMTEzNC9zMTA2Mzc4MjYxNDA2MDEzeA |
| imprint | Pleiades Publishing Ltd, 2014 |
| imprint_str_mv | Pleiades Publishing Ltd, 2014 |
| institution | DE-105, DE-14, DE-Ch1, DE-L229, DE-D275, DE-Bn3, DE-Brt1, DE-D161, DE-Gla1, DE-Zi4, DE-15, DE-Pl11, DE-Rs1 |
| issn | 1063-7826, 1090-6479 |
| issn_str_mv | 1063-7826, 1090-6479 |
| language | English |
| last_indexed | 2024-03-01T10:51:17.927Z |
| match_str | ivina2014featuresofthetwocomponentdecompositionofmonosilanemoleculesonasiliconsurfaceunderepitaxialprocessconditions |
| mega_collection | Pleiades Publishing Ltd (CrossRef) |
| physical | 828-837 |
| publishDate | 2014 |
| publishDateSort | 2014 |
| publisher | Pleiades Publishing Ltd |
| record_format | ai |
| recordtype | ai |
| series | Semiconductors |
| source_id | 49 |
| spelling | Ivina, N. L. Orlov, L. K. 1063-7826 1090-6479 Pleiades Publishing Ltd Condensed Matter Physics Atomic and Molecular Physics, and Optics Electronic, Optical and Magnetic Materials http://dx.doi.org/10.1134/s106378261406013x Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions Semiconductors |
| spellingShingle | Ivina, N. L., Orlov, L. K., Semiconductors, Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials |
| title | Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| title_full | Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| title_fullStr | Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| title_full_unstemmed | Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| title_short | Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| title_sort | features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| title_unstemmed | Features of the two-component decomposition of monosilane molecules on a silicon surface under epitaxial-process conditions |
| topic | Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials |
| url | http://dx.doi.org/10.1134/s106378261406013x |