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Analysis and characterization of an electrostatically actuated in-plane parylene microvalve
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Journal Title: | Journal of Micromechanics and Microengineering |
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Authors and Corporations: | , |
In: | Journal of Micromechanics and Microengineering, 21, 2011, 10, p. 105009 |
Type of Resource: | E-Article |
Language: | Undetermined |
published: |
IOP Publishing
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Subjects: |