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Analysis and characterization of an electrostatically actuated in-plane parylene microvalve
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| Zeitschriftentitel: | Journal of Micromechanics and Microengineering |
|---|---|
| Personen und Körperschaften: | , |
| In: | Journal of Micromechanics and Microengineering, 21, 2011, 10, S. 105009 |
| Format: | E-Article |
| Sprache: | Unbestimmt |
| veröffentlicht: |
IOP Publishing
|
| Schlagwörter: |
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Yıldırım, E Külah, H Yıldırım, E Külah, H |
|---|---|
| author |
Yıldırım, E Külah, H |
| spellingShingle |
Yıldırım, E Külah, H Journal of Micromechanics and Microengineering Analysis and characterization of an electrostatically actuated in-plane parylene microvalve Electrical and Electronic Engineering Mechanical Engineering Mechanics of Materials Electronic, Optical and Magnetic Materials |
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yıldırım, e |
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Yıldırım, E Külah, H 0960-1317 1361-6439 IOP Publishing Electrical and Electronic Engineering Mechanical Engineering Mechanics of Materials Electronic, Optical and Magnetic Materials http://dx.doi.org/10.1088/0960-1317/21/10/105009 Analysis and characterization of an electrostatically actuated in-plane parylene microvalve Journal of Micromechanics and Microengineering |
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Journal of Micromechanics and Microengineering |
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| title |
Analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
| title_unstemmed |
Analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
| title_full |
Analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
| title_fullStr |
Analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
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Analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
| title_short |
Analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
| title_sort |
analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
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Electrical and Electronic Engineering Mechanical Engineering Mechanics of Materials Electronic, Optical and Magnetic Materials |
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http://dx.doi.org/10.1088/0960-1317/21/10/105009 |
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| author | Yıldırım, E, Külah, H |
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| spelling | Yıldırım, E Külah, H 0960-1317 1361-6439 IOP Publishing Electrical and Electronic Engineering Mechanical Engineering Mechanics of Materials Electronic, Optical and Magnetic Materials http://dx.doi.org/10.1088/0960-1317/21/10/105009 Analysis and characterization of an electrostatically actuated in-plane parylene microvalve Journal of Micromechanics and Microengineering |
| spellingShingle | Yıldırım, E, Külah, H, Journal of Micromechanics and Microengineering, Analysis and characterization of an electrostatically actuated in-plane parylene microvalve, Electrical and Electronic Engineering, Mechanical Engineering, Mechanics of Materials, Electronic, Optical and Magnetic Materials |
| title | Analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
| title_full | Analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
| title_fullStr | Analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
| title_full_unstemmed | Analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
| title_short | Analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
| title_sort | analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
| title_unstemmed | Analysis and characterization of an electrostatically actuated in-plane parylene microvalve |
| topic | Electrical and Electronic Engineering, Mechanical Engineering, Mechanics of Materials, Electronic, Optical and Magnetic Materials |
| url | http://dx.doi.org/10.1088/0960-1317/21/10/105009 |