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Investigation of radio frequency plasma for the growth of diamond like carbon films
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| Zeitschriftentitel: | Physics of Plasmas |
|---|---|
| Personen und Körperschaften: | , , , |
| In: | Physics of Plasmas, 19, 2012, 3, S. 033515 |
| Format: | E-Article |
| Sprache: | Englisch |
| veröffentlicht: |
AIP Publishing
|
| Schlagwörter: |
| author_facet |
Ishpal Kumar, Sushil Dwivedi, Neeraj Rauthan, C. M. S. Ishpal Kumar, Sushil Dwivedi, Neeraj Rauthan, C. M. S. |
|---|---|
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Ishpal Kumar, Sushil Dwivedi, Neeraj Rauthan, C. M. S. |
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Ishpal Kumar, Sushil Dwivedi, Neeraj Rauthan, C. M. S. Physics of Plasmas Investigation of radio frequency plasma for the growth of diamond like carbon films Condensed Matter Physics |
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ishpal |
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Ishpal Kumar, Sushil Dwivedi, Neeraj Rauthan, C. M. S. 1070-664X 1089-7674 AIP Publishing Condensed Matter Physics http://dx.doi.org/10.1063/1.3694855 Investigation of radio frequency plasma for the growth of diamond like carbon films Physics of Plasmas |
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Investigation of radio frequency plasma for the growth of diamond like carbon films |
| title_unstemmed |
Investigation of radio frequency plasma for the growth of diamond like carbon films |
| title_full |
Investigation of radio frequency plasma for the growth of diamond like carbon films |
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Investigation of radio frequency plasma for the growth of diamond like carbon films |
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Investigation of radio frequency plasma for the growth of diamond like carbon films |
| title_short |
Investigation of radio frequency plasma for the growth of diamond like carbon films |
| title_sort |
investigation of radio frequency plasma for the growth of diamond like carbon films |
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Condensed Matter Physics |
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http://dx.doi.org/10.1063/1.3694855 |
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2012 |
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| author | Ishpal, Kumar, Sushil, Dwivedi, Neeraj, Rauthan, C. M. S. |
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| institution | DE-D275, DE-Bn3, DE-Brt1, DE-D161, DE-Gla1, DE-Zi4, DE-15, DE-Rs1, DE-Pl11, DE-105, DE-14, DE-Ch1, DE-L229 |
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| spelling | Ishpal Kumar, Sushil Dwivedi, Neeraj Rauthan, C. M. S. 1070-664X 1089-7674 AIP Publishing Condensed Matter Physics http://dx.doi.org/10.1063/1.3694855 Investigation of radio frequency plasma for the growth of diamond like carbon films Physics of Plasmas |
| spellingShingle | Ishpal, Kumar, Sushil, Dwivedi, Neeraj, Rauthan, C. M. S., Physics of Plasmas, Investigation of radio frequency plasma for the growth of diamond like carbon films, Condensed Matter Physics |
| title | Investigation of radio frequency plasma for the growth of diamond like carbon films |
| title_full | Investigation of radio frequency plasma for the growth of diamond like carbon films |
| title_fullStr | Investigation of radio frequency plasma for the growth of diamond like carbon films |
| title_full_unstemmed | Investigation of radio frequency plasma for the growth of diamond like carbon films |
| title_short | Investigation of radio frequency plasma for the growth of diamond like carbon films |
| title_sort | investigation of radio frequency plasma for the growth of diamond like carbon films |
| title_unstemmed | Investigation of radio frequency plasma for the growth of diamond like carbon films |
| topic | Condensed Matter Physics |
| url | http://dx.doi.org/10.1063/1.3694855 |