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Si Surface Preparation for Heteroepitaxial Growth of SiC Using In Situ Oxidation
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Journal Title: | Materials Science Forum |
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Authors and Corporations: | , , , , , , |
In: | Materials Science Forum, 821-823, 2015, p. 205-208 |
Type of Resource: | E-Article |
Language: | Undetermined |
published: |
Trans Tech Publications, Ltd.
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Subjects: |