Eintrag weiter verarbeiten
Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration
Gespeichert in:
| Zeitschriftentitel: | Micromachines |
|---|---|
| Personen und Körperschaften: | , , , , , |
| In: | Micromachines, 10, 2019, 5, S. 315 |
| Format: | E-Article |
| Sprache: | Englisch |
| veröffentlicht: |
MDPI AG
|
| Schlagwörter: |
| author_facet |
Ma, Chicheng Cao, Limin Li, Lei Shao, Mingyu Jing, Dong Guo, Zonghe Ma, Chicheng Cao, Limin Li, Lei Shao, Mingyu Jing, Dong Guo, Zonghe |
|---|---|
| author |
Ma, Chicheng Cao, Limin Li, Lei Shao, Mingyu Jing, Dong Guo, Zonghe |
| spellingShingle |
Ma, Chicheng Cao, Limin Li, Lei Shao, Mingyu Jing, Dong Guo, Zonghe Micromachines Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration Electrical and Electronic Engineering Mechanical Engineering Control and Systems Engineering |
| author_sort |
ma, chicheng |
| spelling |
Ma, Chicheng Cao, Limin Li, Lei Shao, Mingyu Jing, Dong Guo, Zonghe 2072-666X MDPI AG Electrical and Electronic Engineering Mechanical Engineering Control and Systems Engineering http://dx.doi.org/10.3390/mi10050315 <jats:p>Microelectromechanical switch has become an essential component in a wide variety of applications, ranging from biomechanics and aerospace engineering to consumer electronics. Electrostatically actuated microbeams and microplates are chief parts of many MEMS instruments. In this study, the nonlinear characteristics of coupled longitudinal–transversal vibration are analyzed, while an electrostatically actuated microbeam is designed considering that the frequency ratio is two to one between the first longitudinal vibration and transversal vibration. The nonlinear governing equations are truncated into a set of coupled ordinary differential equations by the Galerkin method. Then the equations are solved using the multiple-scales method and the nonlinear dynamics of the internal resonance is investigated. The influence of bias voltage, longitudinal excitation and frequency detuning parameters are mainly analyzed. Results show that using the pseudo-arclength continuation method, the nonlinear amplitude–response curves can be plotted continuously. The saturation and jump phenomena are greatly affected by the bias voltage and the detuning frequency. Beyond the critical excitation amplitude, the response energy will transfer from the longitudinal motion to the transversal motion, even the excitation is employed on the longitudinal direction. The large-amplitude jump of the low-order vibration mode can be used to detect the variation of the conditions or parameters, which shows great potential in improving precision of MEMS switches.</jats:p> Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration Micromachines |
| doi_str_mv |
10.3390/mi10050315 |
| facet_avail |
Online Free |
| finc_class_facet |
Technik Mathematik Physik |
| format |
ElectronicArticle |
| fullrecord |
blob:ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMzM5MC9taTEwMDUwMzE1 |
| id |
ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMzM5MC9taTEwMDUwMzE1 |
| institution |
DE-Pl11 DE-Rs1 DE-105 DE-14 DE-Ch1 DE-L229 DE-D275 DE-Bn3 DE-Brt1 DE-Zwi2 DE-D161 DE-Gla1 DE-Zi4 DE-15 |
| imprint |
MDPI AG, 2019 |
| imprint_str_mv |
MDPI AG, 2019 |
| issn |
2072-666X |
| issn_str_mv |
2072-666X |
| language |
English |
| mega_collection |
MDPI AG (CrossRef) |
| match_str |
ma2019nonlinearbehaviorofelectrostaticallyactuatedmicrobeamswithcoupledlongitudinaltransversalvibration |
| publishDateSort |
2019 |
| publisher |
MDPI AG |
| recordtype |
ai |
| record_format |
ai |
| series |
Micromachines |
| source_id |
49 |
| title |
Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration |
| title_unstemmed |
Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration |
| title_full |
Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration |
| title_fullStr |
Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration |
| title_full_unstemmed |
Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration |
| title_short |
Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration |
| title_sort |
nonlinear behavior of electrostatically actuated microbeams with coupled longitudinal–transversal vibration |
| topic |
Electrical and Electronic Engineering Mechanical Engineering Control and Systems Engineering |
| url |
http://dx.doi.org/10.3390/mi10050315 |
| publishDate |
2019 |
| physical |
315 |
| description |
<jats:p>Microelectromechanical switch has become an essential component in a wide variety of applications, ranging from biomechanics and aerospace engineering to consumer electronics. Electrostatically actuated microbeams and microplates are chief parts of many MEMS instruments. In this study, the nonlinear characteristics of coupled longitudinal–transversal vibration are analyzed, while an electrostatically actuated microbeam is designed considering that the frequency ratio is two to one between the first longitudinal vibration and transversal vibration. The nonlinear governing equations are truncated into a set of coupled ordinary differential equations by the Galerkin method. Then the equations are solved using the multiple-scales method and the nonlinear dynamics of the internal resonance is investigated. The influence of bias voltage, longitudinal excitation and frequency detuning parameters are mainly analyzed. Results show that using the pseudo-arclength continuation method, the nonlinear amplitude–response curves can be plotted continuously. The saturation and jump phenomena are greatly affected by the bias voltage and the detuning frequency. Beyond the critical excitation amplitude, the response energy will transfer from the longitudinal motion to the transversal motion, even the excitation is employed on the longitudinal direction. The large-amplitude jump of the low-order vibration mode can be used to detect the variation of the conditions or parameters, which shows great potential in improving precision of MEMS switches.</jats:p> |
| container_issue |
5 |
| container_start_page |
0 |
| container_title |
Micromachines |
| container_volume |
10 |
| format_de105 |
Article, E-Article |
| format_de14 |
Article, E-Article |
| format_de15 |
Article, E-Article |
| format_de520 |
Article, E-Article |
| format_de540 |
Article, E-Article |
| format_dech1 |
Article, E-Article |
| format_ded117 |
Article, E-Article |
| format_degla1 |
E-Article |
| format_del152 |
Buch |
| format_del189 |
Article, E-Article |
| format_dezi4 |
Article |
| format_dezwi2 |
Article, E-Article |
| format_finc |
Article, E-Article |
| format_nrw |
Article, E-Article |
| _version_ |
1792321312913358861 |
| geogr_code |
not assigned |
| last_indexed |
2024-03-01T11:00:02.373Z |
| geogr_code_person |
not assigned |
| openURL |
url_ver=Z39.88-2004&ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fvufind.svn.sourceforge.net%3Agenerator&rft.title=Nonlinear+Behavior+of+Electrostatically+Actuated+Microbeams+with+Coupled+Longitudinal%E2%80%93Transversal+Vibration&rft.date=2019-05-10&genre=article&issn=2072-666X&volume=10&issue=5&pages=315&jtitle=Micromachines&atitle=Nonlinear+Behavior+of+Electrostatically+Actuated+Microbeams+with+Coupled+Longitudinal%E2%80%93Transversal+Vibration&aulast=Guo&aufirst=Zonghe&rft_id=info%3Adoi%2F10.3390%2Fmi10050315&rft.language%5B0%5D=eng |
| SOLR | |
| _version_ | 1792321312913358861 |
| author | Ma, Chicheng, Cao, Limin, Li, Lei, Shao, Mingyu, Jing, Dong, Guo, Zonghe |
| author_facet | Ma, Chicheng, Cao, Limin, Li, Lei, Shao, Mingyu, Jing, Dong, Guo, Zonghe, Ma, Chicheng, Cao, Limin, Li, Lei, Shao, Mingyu, Jing, Dong, Guo, Zonghe |
| author_sort | ma, chicheng |
| container_issue | 5 |
| container_start_page | 0 |
| container_title | Micromachines |
| container_volume | 10 |
| description | <jats:p>Microelectromechanical switch has become an essential component in a wide variety of applications, ranging from biomechanics and aerospace engineering to consumer electronics. Electrostatically actuated microbeams and microplates are chief parts of many MEMS instruments. In this study, the nonlinear characteristics of coupled longitudinal–transversal vibration are analyzed, while an electrostatically actuated microbeam is designed considering that the frequency ratio is two to one between the first longitudinal vibration and transversal vibration. The nonlinear governing equations are truncated into a set of coupled ordinary differential equations by the Galerkin method. Then the equations are solved using the multiple-scales method and the nonlinear dynamics of the internal resonance is investigated. The influence of bias voltage, longitudinal excitation and frequency detuning parameters are mainly analyzed. Results show that using the pseudo-arclength continuation method, the nonlinear amplitude–response curves can be plotted continuously. The saturation and jump phenomena are greatly affected by the bias voltage and the detuning frequency. Beyond the critical excitation amplitude, the response energy will transfer from the longitudinal motion to the transversal motion, even the excitation is employed on the longitudinal direction. The large-amplitude jump of the low-order vibration mode can be used to detect the variation of the conditions or parameters, which shows great potential in improving precision of MEMS switches.</jats:p> |
| doi_str_mv | 10.3390/mi10050315 |
| facet_avail | Online, Free |
| finc_class_facet | Technik, Mathematik, Physik |
| format | ElectronicArticle |
| format_de105 | Article, E-Article |
| format_de14 | Article, E-Article |
| format_de15 | Article, E-Article |
| format_de520 | Article, E-Article |
| format_de540 | Article, E-Article |
| format_dech1 | Article, E-Article |
| format_ded117 | Article, E-Article |
| format_degla1 | E-Article |
| format_del152 | Buch |
| format_del189 | Article, E-Article |
| format_dezi4 | Article |
| format_dezwi2 | Article, E-Article |
| format_finc | Article, E-Article |
| format_nrw | Article, E-Article |
| geogr_code | not assigned |
| geogr_code_person | not assigned |
| id | ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMzM5MC9taTEwMDUwMzE1 |
| imprint | MDPI AG, 2019 |
| imprint_str_mv | MDPI AG, 2019 |
| institution | DE-Pl11, DE-Rs1, DE-105, DE-14, DE-Ch1, DE-L229, DE-D275, DE-Bn3, DE-Brt1, DE-Zwi2, DE-D161, DE-Gla1, DE-Zi4, DE-15 |
| issn | 2072-666X |
| issn_str_mv | 2072-666X |
| language | English |
| last_indexed | 2024-03-01T11:00:02.373Z |
| match_str | ma2019nonlinearbehaviorofelectrostaticallyactuatedmicrobeamswithcoupledlongitudinaltransversalvibration |
| mega_collection | MDPI AG (CrossRef) |
| physical | 315 |
| publishDate | 2019 |
| publishDateSort | 2019 |
| publisher | MDPI AG |
| record_format | ai |
| recordtype | ai |
| series | Micromachines |
| source_id | 49 |
| spelling | Ma, Chicheng Cao, Limin Li, Lei Shao, Mingyu Jing, Dong Guo, Zonghe 2072-666X MDPI AG Electrical and Electronic Engineering Mechanical Engineering Control and Systems Engineering http://dx.doi.org/10.3390/mi10050315 <jats:p>Microelectromechanical switch has become an essential component in a wide variety of applications, ranging from biomechanics and aerospace engineering to consumer electronics. Electrostatically actuated microbeams and microplates are chief parts of many MEMS instruments. In this study, the nonlinear characteristics of coupled longitudinal–transversal vibration are analyzed, while an electrostatically actuated microbeam is designed considering that the frequency ratio is two to one between the first longitudinal vibration and transversal vibration. The nonlinear governing equations are truncated into a set of coupled ordinary differential equations by the Galerkin method. Then the equations are solved using the multiple-scales method and the nonlinear dynamics of the internal resonance is investigated. The influence of bias voltage, longitudinal excitation and frequency detuning parameters are mainly analyzed. Results show that using the pseudo-arclength continuation method, the nonlinear amplitude–response curves can be plotted continuously. The saturation and jump phenomena are greatly affected by the bias voltage and the detuning frequency. Beyond the critical excitation amplitude, the response energy will transfer from the longitudinal motion to the transversal motion, even the excitation is employed on the longitudinal direction. The large-amplitude jump of the low-order vibration mode can be used to detect the variation of the conditions or parameters, which shows great potential in improving precision of MEMS switches.</jats:p> Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration Micromachines |
| spellingShingle | Ma, Chicheng, Cao, Limin, Li, Lei, Shao, Mingyu, Jing, Dong, Guo, Zonghe, Micromachines, Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration, Electrical and Electronic Engineering, Mechanical Engineering, Control and Systems Engineering |
| title | Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration |
| title_full | Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration |
| title_fullStr | Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration |
| title_full_unstemmed | Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration |
| title_short | Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration |
| title_sort | nonlinear behavior of electrostatically actuated microbeams with coupled longitudinal–transversal vibration |
| title_unstemmed | Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration |
| topic | Electrical and Electronic Engineering, Mechanical Engineering, Control and Systems Engineering |
| url | http://dx.doi.org/10.3390/mi10050315 |