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Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer
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Journal Title: | Micromachines |
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Authors and Corporations: | , , , , , , , |
In: | Micromachines, 10, 2019, 4, p. 227 |
Type of Resource: | E-Article |
Language: | English |
published: |
MDPI AG
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Subjects: |