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Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions
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| Zeitschriftentitel: | Journal of the Japan Institute of Metals |
|---|---|
| Personen und Körperschaften: | , |
| In: | Journal of the Japan Institute of Metals, 47, 1983, 6, S. 494-501 |
| Format: | E-Article |
| Sprache: | Englisch |
| veröffentlicht: |
Japan Institute of Metals
|
| Schlagwörter: |
| author_facet |
Kiuchi, Kiyoshi Kondo, Tatsuo Kiuchi, Kiyoshi Kondo, Tatsuo |
|---|---|
| author |
Kiuchi, Kiyoshi Kondo, Tatsuo |
| spellingShingle |
Kiuchi, Kiyoshi Kondo, Tatsuo Journal of the Japan Institute of Metals Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions Materials Chemistry Metals and Alloys Mechanics of Materials Condensed Matter Physics |
| author_sort |
kiuchi, kiyoshi |
| spelling |
Kiuchi, Kiyoshi Kondo, Tatsuo 0021-4876 1880-6880 Japan Institute of Metals Materials Chemistry Metals and Alloys Mechanics of Materials Condensed Matter Physics http://dx.doi.org/10.2320/jinstmet1952.47.6_494 Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A<SUP>+</SUP> Primary Ions Journal of the Japan Institute of Metals |
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Japan Institute of Metals, 1983 |
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Japan Institute of Metals, 1983 |
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0021-4876 1880-6880 |
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1983 |
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Japan Institute of Metals |
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Journal of the Japan Institute of Metals |
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49 |
| title |
Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions |
| title_unstemmed |
Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions |
| title_full |
Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions |
| title_fullStr |
Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions |
| title_full_unstemmed |
Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions |
| title_short |
Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions |
| title_sort |
effect of oxidation on the sputtering behavior of mo bombarded with a<sup>+</sup> primary ions |
| topic |
Materials Chemistry Metals and Alloys Mechanics of Materials Condensed Matter Physics |
| url |
http://dx.doi.org/10.2320/jinstmet1952.47.6_494 |
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1983 |
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| author | Kiuchi, Kiyoshi, Kondo, Tatsuo |
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| container_start_page | 494 |
| container_title | Journal of the Japan Institute of Metals |
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| id | ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMjMyMC9qaW5zdG1ldDE5NTIuNDcuNl80OTQ |
| imprint | Japan Institute of Metals, 1983 |
| imprint_str_mv | Japan Institute of Metals, 1983 |
| institution | DE-Pl11, DE-Rs1, DE-14, DE-105, DE-Ch1, DE-L229, DE-D275, DE-Bn3, DE-Brt1, DE-Zwi2, DE-D161, DE-Zi4, DE-Gla1, DE-15 |
| issn | 0021-4876, 1880-6880 |
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| physical | 494-501 |
| publishDate | 1983 |
| publishDateSort | 1983 |
| publisher | Japan Institute of Metals |
| record_format | ai |
| recordtype | ai |
| series | Journal of the Japan Institute of Metals |
| source_id | 49 |
| spelling | Kiuchi, Kiyoshi Kondo, Tatsuo 0021-4876 1880-6880 Japan Institute of Metals Materials Chemistry Metals and Alloys Mechanics of Materials Condensed Matter Physics http://dx.doi.org/10.2320/jinstmet1952.47.6_494 Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A<SUP>+</SUP> Primary Ions Journal of the Japan Institute of Metals |
| spellingShingle | Kiuchi, Kiyoshi, Kondo, Tatsuo, Journal of the Japan Institute of Metals, Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions, Materials Chemistry, Metals and Alloys, Mechanics of Materials, Condensed Matter Physics |
| title | Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions |
| title_full | Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions |
| title_fullStr | Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions |
| title_full_unstemmed | Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions |
| title_short | Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions |
| title_sort | effect of oxidation on the sputtering behavior of mo bombarded with a<sup>+</sup> primary ions |
| title_unstemmed | Effect of Oxidation on the Sputtering Behavior of Mo Bombarded with A+ Primary Ions |
| topic | Materials Chemistry, Metals and Alloys, Mechanics of Materials, Condensed Matter Physics |
| url | http://dx.doi.org/10.2320/jinstmet1952.47.6_494 |