author_facet Popovic Renella, Dragana
Spasic, Sasa
Ughini, Remo
Popovic, Radivoje S.
Popovic Renella, Dragana
Spasic, Sasa
Ughini, Remo
Popovic, Radivoje S.
author Popovic Renella, Dragana
Spasic, Sasa
Ughini, Remo
Popovic, Radivoje S.
spellingShingle Popovic Renella, Dragana
Spasic, Sasa
Ughini, Remo
Popovic, Radivoje S.
tm - Technisches Messen
Accurate 3-axis measurement of inhomogeneous magnetic fields
Electrical and Electronic Engineering
Instrumentation
author_sort popovic renella, dragana
spelling Popovic Renella, Dragana Spasic, Sasa Ughini, Remo Popovic, Radivoje S. 2196-7113 0171-8096 Walter de Gruyter GmbH Electrical and Electronic Engineering Instrumentation http://dx.doi.org/10.1515/teme-2018-0082 <jats:title>Abstract</jats:title> <jats:p>Hall effect based Teslameters/Gaussmeters measure DC and AC magnetic flux densities in the range from a few µT to about 30 T. For accurate measurement a 3-axis Hall probe is applied with small magnetic field sensitive volume (MFSV) of 100 µm × 10 µm × 100 µm, with vertical and horizontal Hall elements integrated on a single chip. The planar Hall effect, that produces additional measurement errors is suppressed by the spinning current technique. The orthogonality error of the 3-axis Hall probe is reduced to smaller than 0.1° by the described calibration procedure. This paper explains why the above features are crucial for some applications in industry and modern science for accurate measurement of inhomogeneous magnetic fields and how to achieve them. The future technology trends in magnetic metrology are introduced and the newly developed Nanomapper that incorporates a 3-axis Hall probe with a MFSV of smaller than 10×10×10 micrometer is presented.</jats:p> Accurate 3-axis measurement of inhomogeneous magnetic fields tm - Technisches Messen
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title Accurate 3-axis measurement of inhomogeneous magnetic fields
title_unstemmed Accurate 3-axis measurement of inhomogeneous magnetic fields
title_full Accurate 3-axis measurement of inhomogeneous magnetic fields
title_fullStr Accurate 3-axis measurement of inhomogeneous magnetic fields
title_full_unstemmed Accurate 3-axis measurement of inhomogeneous magnetic fields
title_short Accurate 3-axis measurement of inhomogeneous magnetic fields
title_sort accurate 3-axis measurement of inhomogeneous magnetic fields
topic Electrical and Electronic Engineering
Instrumentation
url http://dx.doi.org/10.1515/teme-2018-0082
publishDate 2019
physical 599-608
description <jats:title>Abstract</jats:title> <jats:p>Hall effect based Teslameters/Gaussmeters measure DC and AC magnetic flux densities in the range from a few µT to about 30 T. For accurate measurement a 3-axis Hall probe is applied with small magnetic field sensitive volume (MFSV) of 100 µm × 10 µm × 100 µm, with vertical and horizontal Hall elements integrated on a single chip. The planar Hall effect, that produces additional measurement errors is suppressed by the spinning current technique. The orthogonality error of the 3-axis Hall probe is reduced to smaller than 0.1° by the described calibration procedure. This paper explains why the above features are crucial for some applications in industry and modern science for accurate measurement of inhomogeneous magnetic fields and how to achieve them. The future technology trends in magnetic metrology are introduced and the newly developed Nanomapper that incorporates a 3-axis Hall probe with a MFSV of smaller than 10×10×10 micrometer is presented.</jats:p>
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author Popovic Renella, Dragana, Spasic, Sasa, Ughini, Remo, Popovic, Radivoje S.
author_facet Popovic Renella, Dragana, Spasic, Sasa, Ughini, Remo, Popovic, Radivoje S., Popovic Renella, Dragana, Spasic, Sasa, Ughini, Remo, Popovic, Radivoje S.
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description <jats:title>Abstract</jats:title> <jats:p>Hall effect based Teslameters/Gaussmeters measure DC and AC magnetic flux densities in the range from a few µT to about 30 T. For accurate measurement a 3-axis Hall probe is applied with small magnetic field sensitive volume (MFSV) of 100 µm × 10 µm × 100 µm, with vertical and horizontal Hall elements integrated on a single chip. The planar Hall effect, that produces additional measurement errors is suppressed by the spinning current technique. The orthogonality error of the 3-axis Hall probe is reduced to smaller than 0.1° by the described calibration procedure. This paper explains why the above features are crucial for some applications in industry and modern science for accurate measurement of inhomogeneous magnetic fields and how to achieve them. The future technology trends in magnetic metrology are introduced and the newly developed Nanomapper that incorporates a 3-axis Hall probe with a MFSV of smaller than 10×10×10 micrometer is presented.</jats:p>
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spelling Popovic Renella, Dragana Spasic, Sasa Ughini, Remo Popovic, Radivoje S. 2196-7113 0171-8096 Walter de Gruyter GmbH Electrical and Electronic Engineering Instrumentation http://dx.doi.org/10.1515/teme-2018-0082 <jats:title>Abstract</jats:title> <jats:p>Hall effect based Teslameters/Gaussmeters measure DC and AC magnetic flux densities in the range from a few µT to about 30 T. For accurate measurement a 3-axis Hall probe is applied with small magnetic field sensitive volume (MFSV) of 100 µm × 10 µm × 100 µm, with vertical and horizontal Hall elements integrated on a single chip. The planar Hall effect, that produces additional measurement errors is suppressed by the spinning current technique. The orthogonality error of the 3-axis Hall probe is reduced to smaller than 0.1° by the described calibration procedure. This paper explains why the above features are crucial for some applications in industry and modern science for accurate measurement of inhomogeneous magnetic fields and how to achieve them. The future technology trends in magnetic metrology are introduced and the newly developed Nanomapper that incorporates a 3-axis Hall probe with a MFSV of smaller than 10×10×10 micrometer is presented.</jats:p> Accurate 3-axis measurement of inhomogeneous magnetic fields tm - Technisches Messen
spellingShingle Popovic Renella, Dragana, Spasic, Sasa, Ughini, Remo, Popovic, Radivoje S., tm - Technisches Messen, Accurate 3-axis measurement of inhomogeneous magnetic fields, Electrical and Electronic Engineering, Instrumentation
title Accurate 3-axis measurement of inhomogeneous magnetic fields
title_full Accurate 3-axis measurement of inhomogeneous magnetic fields
title_fullStr Accurate 3-axis measurement of inhomogeneous magnetic fields
title_full_unstemmed Accurate 3-axis measurement of inhomogeneous magnetic fields
title_short Accurate 3-axis measurement of inhomogeneous magnetic fields
title_sort accurate 3-axis measurement of inhomogeneous magnetic fields
title_unstemmed Accurate 3-axis measurement of inhomogeneous magnetic fields
topic Electrical and Electronic Engineering, Instrumentation
url http://dx.doi.org/10.1515/teme-2018-0082