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Size driven thermodynamic crossovers in phase stability in zirconia and hafnia
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| Zeitschriftentitel: | Journal of the American Ceramic Society |
|---|---|
| Personen und Körperschaften: | , , |
| In: | Journal of the American Ceramic Society, 101, 2018, 1, S. 31-35 |
| Format: | E-Article |
| Sprache: | Englisch |
| veröffentlicht: |
Wiley
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| Schlagwörter: |
| author_facet |
Sharma, Geetu Ushakov, Sergey V. Navrotsky, Alexandra Sharma, Geetu Ushakov, Sergey V. Navrotsky, Alexandra |
|---|---|
| author |
Sharma, Geetu Ushakov, Sergey V. Navrotsky, Alexandra |
| spellingShingle |
Sharma, Geetu Ushakov, Sergey V. Navrotsky, Alexandra Journal of the American Ceramic Society Size driven thermodynamic crossovers in phase stability in zirconia and hafnia Materials Chemistry Ceramics and Composites |
| author_sort |
sharma, geetu |
| spelling |
Sharma, Geetu Ushakov, Sergey V. Navrotsky, Alexandra 0002-7820 1551-2916 Wiley Materials Chemistry Ceramics and Composites http://dx.doi.org/10.1111/jace.15200 <jats:title>Abstract</jats:title><jats:p>Hafnia (HfO<jats:sub>2</jats:sub>) and zirconia (ZrO<jats:sub>2</jats:sub>) are of great interest in the quest for replacing silicon oxide in semiconductor field effect transistors because of their high permittivity. Both exhibit extensive polymorphism and understanding the energetics of their transitions is of major fundamental and practical importance. In this study, we present a systematic thermodynamic summary of the influence of particle size on thermodynamic phase stability in hafnia and zirconia using recently measured enthalpy data from the literature. The amorphous phase is found to be the most energetically stable above 165 and 363 m<jats:sup>2</jats:sup>/g of surface area for HfO<jats:sub>2</jats:sub> and ZrO<jats:sub>2</jats:sub>, respectively. Below 16 and 20.3 m<jats:sup>2</jats:sup>/g of surface area, respectively, the monoclinic phase is the most energetically stable for HfO<jats:sub>2</jats:sub> and ZrO<jats:sub>2</jats:sub>. At intermediate sizes there are closely balanced energetics among monoclinic, tetragonal, and cubic phases. The energy crossovers reflect decreasing surface enthalpy in the order monoclinic, tetragonal, cubic and amorphous for both hafnia and zirconia.</jats:p> Size driven thermodynamic crossovers in phase stability in zirconia and hafnia Journal of the American Ceramic Society |
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| title |
Size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| title_unstemmed |
Size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| title_full |
Size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| title_fullStr |
Size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| title_full_unstemmed |
Size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| title_short |
Size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| title_sort |
size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| topic |
Materials Chemistry Ceramics and Composites |
| url |
http://dx.doi.org/10.1111/jace.15200 |
| publishDate |
2018 |
| physical |
31-35 |
| description |
<jats:title>Abstract</jats:title><jats:p>Hafnia (HfO<jats:sub>2</jats:sub>) and zirconia (ZrO<jats:sub>2</jats:sub>) are of great interest in the quest for replacing silicon oxide in semiconductor field effect transistors because of their high permittivity. Both exhibit extensive polymorphism and understanding the energetics of their transitions is of major fundamental and practical importance. In this study, we present a systematic thermodynamic summary of the influence of particle size on thermodynamic phase stability in hafnia and zirconia using recently measured enthalpy data from the literature. The amorphous phase is found to be the most energetically stable above 165 and 363 m<jats:sup>2</jats:sup>/g of surface area for HfO<jats:sub>2</jats:sub> and ZrO<jats:sub>2</jats:sub>, respectively. Below 16 and 20.3 m<jats:sup>2</jats:sup>/g of surface area, respectively, the monoclinic phase is the most energetically stable for HfO<jats:sub>2</jats:sub> and ZrO<jats:sub>2</jats:sub>. At intermediate sizes there are closely balanced energetics among monoclinic, tetragonal, and cubic phases. The energy crossovers reflect decreasing surface enthalpy in the order monoclinic, tetragonal, cubic and amorphous for both hafnia and zirconia.</jats:p> |
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| author | Sharma, Geetu, Ushakov, Sergey V., Navrotsky, Alexandra |
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| description | <jats:title>Abstract</jats:title><jats:p>Hafnia (HfO<jats:sub>2</jats:sub>) and zirconia (ZrO<jats:sub>2</jats:sub>) are of great interest in the quest for replacing silicon oxide in semiconductor field effect transistors because of their high permittivity. Both exhibit extensive polymorphism and understanding the energetics of their transitions is of major fundamental and practical importance. In this study, we present a systematic thermodynamic summary of the influence of particle size on thermodynamic phase stability in hafnia and zirconia using recently measured enthalpy data from the literature. The amorphous phase is found to be the most energetically stable above 165 and 363 m<jats:sup>2</jats:sup>/g of surface area for HfO<jats:sub>2</jats:sub> and ZrO<jats:sub>2</jats:sub>, respectively. Below 16 and 20.3 m<jats:sup>2</jats:sup>/g of surface area, respectively, the monoclinic phase is the most energetically stable for HfO<jats:sub>2</jats:sub> and ZrO<jats:sub>2</jats:sub>. At intermediate sizes there are closely balanced energetics among monoclinic, tetragonal, and cubic phases. The energy crossovers reflect decreasing surface enthalpy in the order monoclinic, tetragonal, cubic and amorphous for both hafnia and zirconia.</jats:p> |
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| spelling | Sharma, Geetu Ushakov, Sergey V. Navrotsky, Alexandra 0002-7820 1551-2916 Wiley Materials Chemistry Ceramics and Composites http://dx.doi.org/10.1111/jace.15200 <jats:title>Abstract</jats:title><jats:p>Hafnia (HfO<jats:sub>2</jats:sub>) and zirconia (ZrO<jats:sub>2</jats:sub>) are of great interest in the quest for replacing silicon oxide in semiconductor field effect transistors because of their high permittivity. Both exhibit extensive polymorphism and understanding the energetics of their transitions is of major fundamental and practical importance. In this study, we present a systematic thermodynamic summary of the influence of particle size on thermodynamic phase stability in hafnia and zirconia using recently measured enthalpy data from the literature. The amorphous phase is found to be the most energetically stable above 165 and 363 m<jats:sup>2</jats:sup>/g of surface area for HfO<jats:sub>2</jats:sub> and ZrO<jats:sub>2</jats:sub>, respectively. Below 16 and 20.3 m<jats:sup>2</jats:sup>/g of surface area, respectively, the monoclinic phase is the most energetically stable for HfO<jats:sub>2</jats:sub> and ZrO<jats:sub>2</jats:sub>. At intermediate sizes there are closely balanced energetics among monoclinic, tetragonal, and cubic phases. The energy crossovers reflect decreasing surface enthalpy in the order monoclinic, tetragonal, cubic and amorphous for both hafnia and zirconia.</jats:p> Size driven thermodynamic crossovers in phase stability in zirconia and hafnia Journal of the American Ceramic Society |
| spellingShingle | Sharma, Geetu, Ushakov, Sergey V., Navrotsky, Alexandra, Journal of the American Ceramic Society, Size driven thermodynamic crossovers in phase stability in zirconia and hafnia, Materials Chemistry, Ceramics and Composites |
| title | Size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| title_full | Size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| title_fullStr | Size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| title_full_unstemmed | Size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| title_short | Size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| title_sort | size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| title_unstemmed | Size driven thermodynamic crossovers in phase stability in zirconia and hafnia |
| topic | Materials Chemistry, Ceramics and Composites |
| url | http://dx.doi.org/10.1111/jace.15200 |