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Synthesis of Cellular Silica Structure Under Microchannel Confinement
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Zeitschriftentitel: | Journal of the American Ceramic Society |
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Personen und Körperschaften: | , |
In: | Journal of the American Ceramic Society, 90, 2007, 1, S. 36-43 |
Format: | E-Article |
Sprache: | Englisch |
veröffentlicht: |
Wiley
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Schlagwörter: |
author_facet |
Chen, Haibiao Lee, W. Y. Chen, Haibiao Lee, W. Y. |
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author |
Chen, Haibiao Lee, W. Y. |
spellingShingle |
Chen, Haibiao Lee, W. Y. Journal of the American Ceramic Society Synthesis of Cellular Silica Structure Under Microchannel Confinement Materials Chemistry Ceramics and Composites |
author_sort |
chen, haibiao |
spelling |
Chen, Haibiao Lee, W. Y. 0002-7820 1551-2916 Wiley Materials Chemistry Ceramics and Composites http://dx.doi.org/10.1111/j.1551-2916.2006.01336.x <jats:p> <jats:bold>A silica cellular structure was synthesized as a novel means of enhancing the geometrical surface area of a silicon microchannel with cell diameter of ∼10 μm and cell interconnectivity of ∼0.4. Surface‐selective infiltration, assembly, and partial sintering of polystyrene microspheres in the microchannel were used as mechanisms to create a sacrificial template. The polymer template was infiltrated with a silica precursor, and the infiltrated structure was dried and calcined at 500°C to remove the polymer phase and subsequently sintered at 1100°C to form dense silica skeleton. Volume shrinkage and crack formation during calcining and sintering of the infiltrated silica structure were strongly influenced by silica particle size in the precursor. In comparison with free‐standing cellular specimens prepared by similar template methods, the shrinkage and cracking issues offered an interesting challenge for synthesizing the cellular structure which could be net‐shaped into the spatial confinement of the microchannel geometry.</jats:bold> </jats:p> Synthesis of Cellular Silica Structure Under Microchannel Confinement Journal of the American Ceramic Society |
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title |
Synthesis of Cellular Silica Structure Under Microchannel Confinement |
title_unstemmed |
Synthesis of Cellular Silica Structure Under Microchannel Confinement |
title_full |
Synthesis of Cellular Silica Structure Under Microchannel Confinement |
title_fullStr |
Synthesis of Cellular Silica Structure Under Microchannel Confinement |
title_full_unstemmed |
Synthesis of Cellular Silica Structure Under Microchannel Confinement |
title_short |
Synthesis of Cellular Silica Structure Under Microchannel Confinement |
title_sort |
synthesis of cellular silica structure under microchannel confinement |
topic |
Materials Chemistry Ceramics and Composites |
url |
http://dx.doi.org/10.1111/j.1551-2916.2006.01336.x |
publishDate |
2007 |
physical |
36-43 |
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<jats:p> <jats:bold>A silica cellular structure was synthesized as a novel means of enhancing the geometrical surface area of a silicon microchannel with cell diameter of ∼10 μm and cell interconnectivity of ∼0.4. Surface‐selective infiltration, assembly, and partial sintering of polystyrene microspheres in the microchannel were used as mechanisms to create a sacrificial template. The polymer template was infiltrated with a silica precursor, and the infiltrated structure was dried and calcined at 500°C to remove the polymer phase and subsequently sintered at 1100°C to form dense silica skeleton. Volume shrinkage and crack formation during calcining and sintering of the infiltrated silica structure were strongly influenced by silica particle size in the precursor. In comparison with free‐standing cellular specimens prepared by similar template methods, the shrinkage and cracking issues offered an interesting challenge for synthesizing the cellular structure which could be net‐shaped into the spatial confinement of the microchannel geometry.</jats:bold> </jats:p> |
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author | Chen, Haibiao, Lee, W. Y. |
author_facet | Chen, Haibiao, Lee, W. Y., Chen, Haibiao, Lee, W. Y. |
author_sort | chen, haibiao |
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container_title | Journal of the American Ceramic Society |
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description | <jats:p> <jats:bold>A silica cellular structure was synthesized as a novel means of enhancing the geometrical surface area of a silicon microchannel with cell diameter of ∼10 μm and cell interconnectivity of ∼0.4. Surface‐selective infiltration, assembly, and partial sintering of polystyrene microspheres in the microchannel were used as mechanisms to create a sacrificial template. The polymer template was infiltrated with a silica precursor, and the infiltrated structure was dried and calcined at 500°C to remove the polymer phase and subsequently sintered at 1100°C to form dense silica skeleton. Volume shrinkage and crack formation during calcining and sintering of the infiltrated silica structure were strongly influenced by silica particle size in the precursor. In comparison with free‐standing cellular specimens prepared by similar template methods, the shrinkage and cracking issues offered an interesting challenge for synthesizing the cellular structure which could be net‐shaped into the spatial confinement of the microchannel geometry.</jats:bold> </jats:p> |
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spelling | Chen, Haibiao Lee, W. Y. 0002-7820 1551-2916 Wiley Materials Chemistry Ceramics and Composites http://dx.doi.org/10.1111/j.1551-2916.2006.01336.x <jats:p> <jats:bold>A silica cellular structure was synthesized as a novel means of enhancing the geometrical surface area of a silicon microchannel with cell diameter of ∼10 μm and cell interconnectivity of ∼0.4. Surface‐selective infiltration, assembly, and partial sintering of polystyrene microspheres in the microchannel were used as mechanisms to create a sacrificial template. The polymer template was infiltrated with a silica precursor, and the infiltrated structure was dried and calcined at 500°C to remove the polymer phase and subsequently sintered at 1100°C to form dense silica skeleton. Volume shrinkage and crack formation during calcining and sintering of the infiltrated silica structure were strongly influenced by silica particle size in the precursor. In comparison with free‐standing cellular specimens prepared by similar template methods, the shrinkage and cracking issues offered an interesting challenge for synthesizing the cellular structure which could be net‐shaped into the spatial confinement of the microchannel geometry.</jats:bold> </jats:p> Synthesis of Cellular Silica Structure Under Microchannel Confinement Journal of the American Ceramic Society |
spellingShingle | Chen, Haibiao, Lee, W. Y., Journal of the American Ceramic Society, Synthesis of Cellular Silica Structure Under Microchannel Confinement, Materials Chemistry, Ceramics and Composites |
title | Synthesis of Cellular Silica Structure Under Microchannel Confinement |
title_full | Synthesis of Cellular Silica Structure Under Microchannel Confinement |
title_fullStr | Synthesis of Cellular Silica Structure Under Microchannel Confinement |
title_full_unstemmed | Synthesis of Cellular Silica Structure Under Microchannel Confinement |
title_short | Synthesis of Cellular Silica Structure Under Microchannel Confinement |
title_sort | synthesis of cellular silica structure under microchannel confinement |
title_unstemmed | Synthesis of Cellular Silica Structure Under Microchannel Confinement |
topic | Materials Chemistry, Ceramics and Composites |
url | http://dx.doi.org/10.1111/j.1551-2916.2006.01336.x |