author_facet Chen, Haibiao
Lee, W. Y.
Chen, Haibiao
Lee, W. Y.
author Chen, Haibiao
Lee, W. Y.
spellingShingle Chen, Haibiao
Lee, W. Y.
Journal of the American Ceramic Society
Synthesis of Cellular Silica Structure Under Microchannel Confinement
Materials Chemistry
Ceramics and Composites
author_sort chen, haibiao
spelling Chen, Haibiao Lee, W. Y. 0002-7820 1551-2916 Wiley Materials Chemistry Ceramics and Composites http://dx.doi.org/10.1111/j.1551-2916.2006.01336.x <jats:p> <jats:bold>A silica cellular structure was synthesized as a novel means of enhancing the geometrical surface area of a silicon microchannel with cell diameter of ∼10 μm and cell interconnectivity of ∼0.4. Surface‐selective infiltration, assembly, and partial sintering of polystyrene microspheres in the microchannel were used as mechanisms to create a sacrificial template. The polymer template was infiltrated with a silica precursor, and the infiltrated structure was dried and calcined at 500°C to remove the polymer phase and subsequently sintered at 1100°C to form dense silica skeleton. Volume shrinkage and crack formation during calcining and sintering of the infiltrated silica structure were strongly influenced by silica particle size in the precursor. In comparison with free‐standing cellular specimens prepared by similar template methods, the shrinkage and cracking issues offered an interesting challenge for synthesizing the cellular structure which could be net‐shaped into the spatial confinement of the microchannel geometry.</jats:bold> </jats:p> Synthesis of Cellular Silica Structure Under Microchannel Confinement Journal of the American Ceramic Society
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title Synthesis of Cellular Silica Structure Under Microchannel Confinement
title_unstemmed Synthesis of Cellular Silica Structure Under Microchannel Confinement
title_full Synthesis of Cellular Silica Structure Under Microchannel Confinement
title_fullStr Synthesis of Cellular Silica Structure Under Microchannel Confinement
title_full_unstemmed Synthesis of Cellular Silica Structure Under Microchannel Confinement
title_short Synthesis of Cellular Silica Structure Under Microchannel Confinement
title_sort synthesis of cellular silica structure under microchannel confinement
topic Materials Chemistry
Ceramics and Composites
url http://dx.doi.org/10.1111/j.1551-2916.2006.01336.x
publishDate 2007
physical 36-43
description <jats:p> <jats:bold>A silica cellular structure was synthesized as a novel means of enhancing the geometrical surface area of a silicon microchannel with cell diameter of ∼10 μm and cell interconnectivity of ∼0.4. Surface‐selective infiltration, assembly, and partial sintering of polystyrene microspheres in the microchannel were used as mechanisms to create a sacrificial template. The polymer template was infiltrated with a silica precursor, and the infiltrated structure was dried and calcined at 500°C to remove the polymer phase and subsequently sintered at 1100°C to form dense silica skeleton. Volume shrinkage and crack formation during calcining and sintering of the infiltrated silica structure were strongly influenced by silica particle size in the precursor. In comparison with free‐standing cellular specimens prepared by similar template methods, the shrinkage and cracking issues offered an interesting challenge for synthesizing the cellular structure which could be net‐shaped into the spatial confinement of the microchannel geometry.</jats:bold> </jats:p>
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author Chen, Haibiao, Lee, W. Y.
author_facet Chen, Haibiao, Lee, W. Y., Chen, Haibiao, Lee, W. Y.
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container_issue 1
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description <jats:p> <jats:bold>A silica cellular structure was synthesized as a novel means of enhancing the geometrical surface area of a silicon microchannel with cell diameter of ∼10 μm and cell interconnectivity of ∼0.4. Surface‐selective infiltration, assembly, and partial sintering of polystyrene microspheres in the microchannel were used as mechanisms to create a sacrificial template. The polymer template was infiltrated with a silica precursor, and the infiltrated structure was dried and calcined at 500°C to remove the polymer phase and subsequently sintered at 1100°C to form dense silica skeleton. Volume shrinkage and crack formation during calcining and sintering of the infiltrated silica structure were strongly influenced by silica particle size in the precursor. In comparison with free‐standing cellular specimens prepared by similar template methods, the shrinkage and cracking issues offered an interesting challenge for synthesizing the cellular structure which could be net‐shaped into the spatial confinement of the microchannel geometry.</jats:bold> </jats:p>
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spelling Chen, Haibiao Lee, W. Y. 0002-7820 1551-2916 Wiley Materials Chemistry Ceramics and Composites http://dx.doi.org/10.1111/j.1551-2916.2006.01336.x <jats:p> <jats:bold>A silica cellular structure was synthesized as a novel means of enhancing the geometrical surface area of a silicon microchannel with cell diameter of ∼10 μm and cell interconnectivity of ∼0.4. Surface‐selective infiltration, assembly, and partial sintering of polystyrene microspheres in the microchannel were used as mechanisms to create a sacrificial template. The polymer template was infiltrated with a silica precursor, and the infiltrated structure was dried and calcined at 500°C to remove the polymer phase and subsequently sintered at 1100°C to form dense silica skeleton. Volume shrinkage and crack formation during calcining and sintering of the infiltrated silica structure were strongly influenced by silica particle size in the precursor. In comparison with free‐standing cellular specimens prepared by similar template methods, the shrinkage and cracking issues offered an interesting challenge for synthesizing the cellular structure which could be net‐shaped into the spatial confinement of the microchannel geometry.</jats:bold> </jats:p> Synthesis of Cellular Silica Structure Under Microchannel Confinement Journal of the American Ceramic Society
spellingShingle Chen, Haibiao, Lee, W. Y., Journal of the American Ceramic Society, Synthesis of Cellular Silica Structure Under Microchannel Confinement, Materials Chemistry, Ceramics and Composites
title Synthesis of Cellular Silica Structure Under Microchannel Confinement
title_full Synthesis of Cellular Silica Structure Under Microchannel Confinement
title_fullStr Synthesis of Cellular Silica Structure Under Microchannel Confinement
title_full_unstemmed Synthesis of Cellular Silica Structure Under Microchannel Confinement
title_short Synthesis of Cellular Silica Structure Under Microchannel Confinement
title_sort synthesis of cellular silica structure under microchannel confinement
title_unstemmed Synthesis of Cellular Silica Structure Under Microchannel Confinement
topic Materials Chemistry, Ceramics and Composites
url http://dx.doi.org/10.1111/j.1551-2916.2006.01336.x