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Dark-field electron holography as a recording of crystal diffraction in real space: a comparative study with high-resolution X-ray diffraction for strain analysis of MOSFETs
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Tytuł czasopisma: | Journal of Applied Crystallography |
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Personen und Körperschaften: | , , , , , , , , |
In: | Journal of Applied Crystallography, 53, 2020, 4, S. 885-895 |
Format: | E-Article |
Język: | Unbestimmt |
Wydane: |
International Union of Crystallography (IUCr)
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Hasła przedmiotowe: |