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Progress toward the fabrication of scanning near field optical probe: pattern definition by e-beam lithography
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Journal Title: | Microelectronic Engineering |
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Authors and Corporations: | , , |
In: | Microelectronic Engineering, 57-58, 2001, p. 807-811 |
Type of Resource: | E-Article |
Language: | English |
published: |
Elsevier BV
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Subjects: |