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Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry
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| Zeitschriftentitel: | Science and Technology of Advanced Materials |
|---|---|
| Personen und Körperschaften: | |
| In: | Science and Technology of Advanced Materials, 5, 2004, 5-6, S. 651-655 |
| Format: | E-Article |
| Sprache: | Englisch |
| veröffentlicht: |
Informa UK Limited
|
| Schlagwörter: |
| author_facet |
Akatsuka, Hiroshi Akatsuka, Hiroshi |
|---|---|
| author |
Akatsuka, Hiroshi |
| spellingShingle |
Akatsuka, Hiroshi Science and Technology of Advanced Materials Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry General Materials Science |
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akatsuka, hiroshi |
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Akatsuka, Hiroshi 1468-6996 1878-5514 Informa UK Limited General Materials Science http://dx.doi.org/10.1016/j.stam.2004.03.005 Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry Science and Technology of Advanced Materials |
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Informa UK Limited, 2004 |
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Informa UK Limited, 2004 |
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1468-6996 1878-5514 |
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Science and Technology of Advanced Materials |
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| title |
Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| title_unstemmed |
Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| title_full |
Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| title_fullStr |
Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| title_full_unstemmed |
Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| title_short |
Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| title_sort |
plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| topic |
General Materials Science |
| url |
http://dx.doi.org/10.1016/j.stam.2004.03.005 |
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2004 |
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651-655 |
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| id | ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMTAxNi9qLnN0YW0uMjAwNC4wMy4wMDU |
| imprint | Informa UK Limited, 2004 |
| imprint_str_mv | Informa UK Limited, 2004 |
| institution | DE-Ch1, DE-L229, DE-D275, DE-Bn3, DE-Brt1, DE-D161, DE-Zwi2, DE-Gla1, DE-Zi4, DE-15, DE-Pl11, DE-Rs1, DE-105, DE-14 |
| issn | 1468-6996, 1878-5514 |
| issn_str_mv | 1468-6996, 1878-5514 |
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| physical | 651-655 |
| publishDate | 2004 |
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| series | Science and Technology of Advanced Materials |
| source_id | 49 |
| spelling | Akatsuka, Hiroshi 1468-6996 1878-5514 Informa UK Limited General Materials Science http://dx.doi.org/10.1016/j.stam.2004.03.005 Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry Science and Technology of Advanced Materials |
| spellingShingle | Akatsuka, Hiroshi, Science and Technology of Advanced Materials, Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry, General Materials Science |
| title | Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| title_full | Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| title_fullStr | Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| title_full_unstemmed | Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| title_short | Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| title_sort | plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| title_unstemmed | Plasma diagnostics in plasma processing for nanotechnology and nanolevel chemistry |
| topic | General Materials Science |
| url | http://dx.doi.org/10.1016/j.stam.2004.03.005 |