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Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing
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| Zeitschriftentitel: | Materials Chemistry and Physics |
|---|---|
| Personen und Körperschaften: | , |
| In: | Materials Chemistry and Physics, 33, 1993, 1-2, S. 124-129 |
| Format: | E-Article |
| Sprache: | Englisch |
| veröffentlicht: |
Elsevier BV
|
| Schlagwörter: |
| author_facet |
Cheng, H.C. Juang, M.H. Cheng, H.C. Juang, M.H. |
|---|---|
| author |
Cheng, H.C. Juang, M.H. |
| spellingShingle |
Cheng, H.C. Juang, M.H. Materials Chemistry and Physics Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing Condensed Matter Physics General Materials Science |
| author_sort |
cheng, h.c. |
| spelling |
Cheng, H.C. Juang, M.H. 0254-0584 Elsevier BV Condensed Matter Physics General Materials Science http://dx.doi.org/10.1016/0254-0584(93)90102-r Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing Materials Chemistry and Physics |
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10.1016/0254-0584(93)90102-r |
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Elsevier BV, 1993 |
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Elsevier BV, 1993 |
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0254-0584 |
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0254-0584 |
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English |
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Elsevier BV (CrossRef) |
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1993 |
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Elsevier BV |
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Materials Chemistry and Physics |
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49 |
| title |
Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing |
| title_unstemmed |
Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing |
| title_full |
Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing |
| title_fullStr |
Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing |
| title_full_unstemmed |
Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing |
| title_short |
Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing |
| title_sort |
shallow n+p junction formation by implanting p+ ions into thin co films and laser processing |
| topic |
Condensed Matter Physics General Materials Science |
| url |
http://dx.doi.org/10.1016/0254-0584(93)90102-r |
| publishDate |
1993 |
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124-129 |
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| author | Cheng, H.C., Juang, M.H. |
| author_facet | Cheng, H.C., Juang, M.H., Cheng, H.C., Juang, M.H. |
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| container_start_page | 124 |
| container_title | Materials Chemistry and Physics |
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| id | ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMTAxNi8wMjU0LTA1ODQoOTMpOTAxMDItcg |
| imprint | Elsevier BV, 1993 |
| imprint_str_mv | Elsevier BV, 1993 |
| institution | DE-Rs1, DE-Pl11, DE-105, DE-14, DE-Ch1, DE-L229, DE-D275, DE-Bn3, DE-Brt1, DE-D161, DE-Gla1, DE-Zi4, DE-15 |
| issn | 0254-0584 |
| issn_str_mv | 0254-0584 |
| language | English |
| last_indexed | 2024-03-01T11:00:02.203Z |
| match_str | cheng1993shallownpjunctionformationbyimplantingpionsintothincofilmsandlaserprocessing |
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| physical | 124-129 |
| publishDate | 1993 |
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| publisher | Elsevier BV |
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| recordtype | ai |
| series | Materials Chemistry and Physics |
| source_id | 49 |
| spelling | Cheng, H.C. Juang, M.H. 0254-0584 Elsevier BV Condensed Matter Physics General Materials Science http://dx.doi.org/10.1016/0254-0584(93)90102-r Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing Materials Chemistry and Physics |
| spellingShingle | Cheng, H.C., Juang, M.H., Materials Chemistry and Physics, Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing, Condensed Matter Physics, General Materials Science |
| title | Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing |
| title_full | Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing |
| title_fullStr | Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing |
| title_full_unstemmed | Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing |
| title_short | Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing |
| title_sort | shallow n+p junction formation by implanting p+ ions into thin co films and laser processing |
| title_unstemmed | Shallow n+p junction formation by implanting P+ ions into thin Co films and laser processing |
| topic | Condensed Matter Physics, General Materials Science |
| url | http://dx.doi.org/10.1016/0254-0584(93)90102-r |