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Definition of geometries with complicated, curved boundaries for electron beam pattern generation
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Journal Title: | Microelectronic Engineering |
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Authors and Corporations: | , |
In: | Microelectronic Engineering, 9, 1989, 1-4, p. 495-497 |
Type of Resource: | E-Article |
Language: | English |
published: |
Elsevier BV
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Subjects: |