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Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry
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| Zeitschriftentitel: | Rapid Communications in Mass Spectrometry |
|---|---|
| Personen und Körperschaften: | , , , , |
| In: | Rapid Communications in Mass Spectrometry, 19, 2005, 9, S. 1159-1166 |
| Format: | E-Article |
| Sprache: | Englisch |
| veröffentlicht: |
Wiley
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| Schlagwörter: |
| author_facet |
Wang, Wei‐Guo Xu, Yong Yang, Xue‐Feng Wang, Wen‐Chun Zhu, Ai‐Min Wang, Wei‐Guo Xu, Yong Yang, Xue‐Feng Wang, Wen‐Chun Zhu, Ai‐Min |
|---|---|
| author |
Wang, Wei‐Guo Xu, Yong Yang, Xue‐Feng Wang, Wen‐Chun Zhu, Ai‐Min |
| spellingShingle |
Wang, Wei‐Guo Xu, Yong Yang, Xue‐Feng Wang, Wen‐Chun Zhu, Ai‐Min Rapid Communications in Mass Spectrometry Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry Organic Chemistry Spectroscopy Analytical Chemistry |
| author_sort |
wang, wei‐guo |
| spelling |
Wang, Wei‐Guo Xu, Yong Yang, Xue‐Feng Wang, Wen‐Chun Zhu, Ai‐Min 0951-4198 1097-0231 Wiley Organic Chemistry Spectroscopy Analytical Chemistry http://dx.doi.org/10.1002/rcm.1906 <jats:title>Abstract</jats:title><jats:p>Atomic hydrogen plays important roles in chemical vapor deposition of functional materials, plasma etching and new approaches to chemical synthesis of hydrogen‐containing compounds. The present work reports experimental determinations of atomic hydrogen near the grounded electrode in medium‐pressure dielectric barrier discharge hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry (MB‐TIMS). At certain discharge conditions (a.c. frequency of 24 kHz, 28 kV of peak‐to‐peak voltage), the measured hydrogen dissociation fraction is decreased from ∼0.83% to ∼0.14% as the hydrogen pressure increases from 2.0 to 14.0 Torr. A simulation method for extraction of the approximate electron beam energy distribution function in the mass spectrometer ionizer and a semi‐quantitative approach to calibrate the mass discrimination effect caused by the supersonic beam formation and the mass spectrometer measurement are reported. Copyright © 2005 John Wiley & Sons, Ltd.</jats:p> Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry Rapid Communications in Mass Spectrometry |
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Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| title_unstemmed |
Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| title_full |
Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| title_fullStr |
Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| title_full_unstemmed |
Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| title_short |
Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| title_sort |
determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| topic |
Organic Chemistry Spectroscopy Analytical Chemistry |
| url |
http://dx.doi.org/10.1002/rcm.1906 |
| publishDate |
2005 |
| physical |
1159-1166 |
| description |
<jats:title>Abstract</jats:title><jats:p>Atomic hydrogen plays important roles in chemical vapor deposition of functional materials, plasma etching and new approaches to chemical synthesis of hydrogen‐containing compounds. The present work reports experimental determinations of atomic hydrogen near the grounded electrode in medium‐pressure dielectric barrier discharge hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry (MB‐TIMS). At certain discharge conditions (a.c. frequency of 24 kHz, 28 kV of peak‐to‐peak voltage), the measured hydrogen dissociation fraction is decreased from ∼0.83% to ∼0.14% as the hydrogen pressure increases from 2.0 to 14.0 Torr. A simulation method for extraction of the approximate electron beam energy distribution function in the mass spectrometer ionizer and a semi‐quantitative approach to calibrate the mass discrimination effect caused by the supersonic beam formation and the mass spectrometer measurement are reported. Copyright © 2005 John Wiley & Sons, Ltd.</jats:p> |
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| author | Wang, Wei‐Guo, Xu, Yong, Yang, Xue‐Feng, Wang, Wen‐Chun, Zhu, Ai‐Min |
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| description | <jats:title>Abstract</jats:title><jats:p>Atomic hydrogen plays important roles in chemical vapor deposition of functional materials, plasma etching and new approaches to chemical synthesis of hydrogen‐containing compounds. The present work reports experimental determinations of atomic hydrogen near the grounded electrode in medium‐pressure dielectric barrier discharge hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry (MB‐TIMS). At certain discharge conditions (a.c. frequency of 24 kHz, 28 kV of peak‐to‐peak voltage), the measured hydrogen dissociation fraction is decreased from ∼0.83% to ∼0.14% as the hydrogen pressure increases from 2.0 to 14.0 Torr. A simulation method for extraction of the approximate electron beam energy distribution function in the mass spectrometer ionizer and a semi‐quantitative approach to calibrate the mass discrimination effect caused by the supersonic beam formation and the mass spectrometer measurement are reported. Copyright © 2005 John Wiley & Sons, Ltd.</jats:p> |
| doi_str_mv | 10.1002/rcm.1906 |
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| imprint_str_mv | Wiley, 2005 |
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| physical | 1159-1166 |
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| publishDateSort | 2005 |
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| series | Rapid Communications in Mass Spectrometry |
| source_id | 49 |
| spelling | Wang, Wei‐Guo Xu, Yong Yang, Xue‐Feng Wang, Wen‐Chun Zhu, Ai‐Min 0951-4198 1097-0231 Wiley Organic Chemistry Spectroscopy Analytical Chemistry http://dx.doi.org/10.1002/rcm.1906 <jats:title>Abstract</jats:title><jats:p>Atomic hydrogen plays important roles in chemical vapor deposition of functional materials, plasma etching and new approaches to chemical synthesis of hydrogen‐containing compounds. The present work reports experimental determinations of atomic hydrogen near the grounded electrode in medium‐pressure dielectric barrier discharge hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry (MB‐TIMS). At certain discharge conditions (a.c. frequency of 24 kHz, 28 kV of peak‐to‐peak voltage), the measured hydrogen dissociation fraction is decreased from ∼0.83% to ∼0.14% as the hydrogen pressure increases from 2.0 to 14.0 Torr. A simulation method for extraction of the approximate electron beam energy distribution function in the mass spectrometer ionizer and a semi‐quantitative approach to calibrate the mass discrimination effect caused by the supersonic beam formation and the mass spectrometer measurement are reported. Copyright © 2005 John Wiley & Sons, Ltd.</jats:p> Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry Rapid Communications in Mass Spectrometry |
| spellingShingle | Wang, Wei‐Guo, Xu, Yong, Yang, Xue‐Feng, Wang, Wen‐Chun, Zhu, Ai‐Min, Rapid Communications in Mass Spectrometry, Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry, Organic Chemistry, Spectroscopy, Analytical Chemistry |
| title | Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| title_full | Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| title_fullStr | Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| title_full_unstemmed | Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| title_short | Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| title_sort | determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| title_unstemmed | Determination of atomic hydrogen in non‐thermal hydrogen plasmas by means of molecular beam threshold ionization mass spectrometry |
| topic | Organic Chemistry, Spectroscopy, Analytical Chemistry |
| url | http://dx.doi.org/10.1002/rcm.1906 |