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Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors
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| Zeitschriftentitel: | physica status solidi (a) |
|---|---|
| Personen und Körperschaften: | , , , , , , , |
| In: | physica status solidi (a), 215, 2018, 23 |
| Format: | E-Article |
| Sprache: | Englisch |
| veröffentlicht: |
Wiley
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| Schlagwörter: |
| author_facet |
Tetsi, Emmanuel Philippot, Gilles Bord Majek, Isabelle Aymonier, Cyril Audet, Jean Lemire, Roxan Bechou, Laurent Drouin, Dominique Tetsi, Emmanuel Philippot, Gilles Bord Majek, Isabelle Aymonier, Cyril Audet, Jean Lemire, Roxan Bechou, Laurent Drouin, Dominique |
|---|---|
| author |
Tetsi, Emmanuel Philippot, Gilles Bord Majek, Isabelle Aymonier, Cyril Audet, Jean Lemire, Roxan Bechou, Laurent Drouin, Dominique |
| spellingShingle |
Tetsi, Emmanuel Philippot, Gilles Bord Majek, Isabelle Aymonier, Cyril Audet, Jean Lemire, Roxan Bechou, Laurent Drouin, Dominique physica status solidi (a) Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors Materials Chemistry Electrical and Electronic Engineering Surfaces, Coatings and Films Surfaces and Interfaces Condensed Matter Physics Electronic, Optical and Magnetic Materials |
| author_sort |
tetsi, emmanuel |
| spelling |
Tetsi, Emmanuel Philippot, Gilles Bord Majek, Isabelle Aymonier, Cyril Audet, Jean Lemire, Roxan Bechou, Laurent Drouin, Dominique 1862-6300 1862-6319 Wiley Materials Chemistry Electrical and Electronic Engineering Surfaces, Coatings and Films Surfaces and Interfaces Condensed Matter Physics Electronic, Optical and Magnetic Materials http://dx.doi.org/10.1002/pssa.201800478 <jats:sec><jats:label /><jats:p>Metal‐insulator‐metal (MIM) capacitors with Ba<jats:sub>0.6</jats:sub>Sr<jats:sub>0.4</jats:sub>TiO<jats:sub>3</jats:sub> (BST) thin films as insulating layers are fabricated using a novel, fast, and low‐cost method. On one hand, the process lies in the swift, continuous, and scalable synthesis of BST nanoparticles using the supercritical fluid technology and, on the other hand, the nonpyrolytic spray coating of thin films using colloidal nanocrystals as ink. The authors focus on the deposition process of thin and uniform layer. A dispersed colloidal suspension based on BST nanoparticles is deposited on a hot copper substrate. A 200 nm thick dielectric film is successfully obtained. Electrical characterizations of Cu/BST/Al MIM structure demonstrate a state‐of‐the‐art capacitance density almost reaching 1 µF cm<jats:sup>−2</jats:sup> within an operating voltage range of ±1 V. Moreover, an annealing process of the dielectric layer and the final MIM capacitor at 90 °C during 15 h brings a significant decrease of the leakage current by three decades from mA cm<jats:sup>−2</jats:sup> to µA cm<jats:sup>−2</jats:sup>.</jats:p></jats:sec> Ba<sub>0.6</sub>Sr<sub>0.4</sub>TiO<sub>3</sub> Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors physica status solidi (a) |
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| title |
Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors |
| title_unstemmed |
Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors |
| title_full |
Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors |
| title_fullStr |
Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors |
| title_full_unstemmed |
Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors |
| title_short |
Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors |
| title_sort |
ba<sub>0.6</sub>sr<sub>0.4</sub>tio<sub>3</sub> thin films deposited by spray coating for high capacitance density capacitors |
| topic |
Materials Chemistry Electrical and Electronic Engineering Surfaces, Coatings and Films Surfaces and Interfaces Condensed Matter Physics Electronic, Optical and Magnetic Materials |
| url |
http://dx.doi.org/10.1002/pssa.201800478 |
| publishDate |
2018 |
| physical |
|
| description |
<jats:sec><jats:label /><jats:p>Metal‐insulator‐metal (MIM) capacitors with Ba<jats:sub>0.6</jats:sub>Sr<jats:sub>0.4</jats:sub>TiO<jats:sub>3</jats:sub> (BST) thin films as insulating layers are fabricated using a novel, fast, and low‐cost method. On one hand, the process lies in the swift, continuous, and scalable synthesis of BST nanoparticles using the supercritical fluid technology and, on the other hand, the nonpyrolytic spray coating of thin films using colloidal nanocrystals as ink. The authors focus on the deposition process of thin and uniform layer. A dispersed colloidal suspension based on BST nanoparticles is deposited on a hot copper substrate. A 200 nm thick dielectric film is successfully obtained. Electrical characterizations of Cu/BST/Al MIM structure demonstrate a state‐of‐the‐art capacitance density almost reaching 1 µF cm<jats:sup>−2</jats:sup> within an operating voltage range of ±1 V. Moreover, an annealing process of the dielectric layer and the final MIM capacitor at 90 °C during 15 h brings a significant decrease of the leakage current by three decades from mA cm<jats:sup>−2</jats:sup> to µA cm<jats:sup>−2</jats:sup>.</jats:p></jats:sec> |
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| author | Tetsi, Emmanuel, Philippot, Gilles, Bord Majek, Isabelle, Aymonier, Cyril, Audet, Jean, Lemire, Roxan, Bechou, Laurent, Drouin, Dominique |
| author_facet | Tetsi, Emmanuel, Philippot, Gilles, Bord Majek, Isabelle, Aymonier, Cyril, Audet, Jean, Lemire, Roxan, Bechou, Laurent, Drouin, Dominique, Tetsi, Emmanuel, Philippot, Gilles, Bord Majek, Isabelle, Aymonier, Cyril, Audet, Jean, Lemire, Roxan, Bechou, Laurent, Drouin, Dominique |
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| description | <jats:sec><jats:label /><jats:p>Metal‐insulator‐metal (MIM) capacitors with Ba<jats:sub>0.6</jats:sub>Sr<jats:sub>0.4</jats:sub>TiO<jats:sub>3</jats:sub> (BST) thin films as insulating layers are fabricated using a novel, fast, and low‐cost method. On one hand, the process lies in the swift, continuous, and scalable synthesis of BST nanoparticles using the supercritical fluid technology and, on the other hand, the nonpyrolytic spray coating of thin films using colloidal nanocrystals as ink. The authors focus on the deposition process of thin and uniform layer. A dispersed colloidal suspension based on BST nanoparticles is deposited on a hot copper substrate. A 200 nm thick dielectric film is successfully obtained. Electrical characterizations of Cu/BST/Al MIM structure demonstrate a state‐of‐the‐art capacitance density almost reaching 1 µF cm<jats:sup>−2</jats:sup> within an operating voltage range of ±1 V. Moreover, an annealing process of the dielectric layer and the final MIM capacitor at 90 °C during 15 h brings a significant decrease of the leakage current by three decades from mA cm<jats:sup>−2</jats:sup> to µA cm<jats:sup>−2</jats:sup>.</jats:p></jats:sec> |
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| spelling | Tetsi, Emmanuel Philippot, Gilles Bord Majek, Isabelle Aymonier, Cyril Audet, Jean Lemire, Roxan Bechou, Laurent Drouin, Dominique 1862-6300 1862-6319 Wiley Materials Chemistry Electrical and Electronic Engineering Surfaces, Coatings and Films Surfaces and Interfaces Condensed Matter Physics Electronic, Optical and Magnetic Materials http://dx.doi.org/10.1002/pssa.201800478 <jats:sec><jats:label /><jats:p>Metal‐insulator‐metal (MIM) capacitors with Ba<jats:sub>0.6</jats:sub>Sr<jats:sub>0.4</jats:sub>TiO<jats:sub>3</jats:sub> (BST) thin films as insulating layers are fabricated using a novel, fast, and low‐cost method. On one hand, the process lies in the swift, continuous, and scalable synthesis of BST nanoparticles using the supercritical fluid technology and, on the other hand, the nonpyrolytic spray coating of thin films using colloidal nanocrystals as ink. The authors focus on the deposition process of thin and uniform layer. A dispersed colloidal suspension based on BST nanoparticles is deposited on a hot copper substrate. A 200 nm thick dielectric film is successfully obtained. Electrical characterizations of Cu/BST/Al MIM structure demonstrate a state‐of‐the‐art capacitance density almost reaching 1 µF cm<jats:sup>−2</jats:sup> within an operating voltage range of ±1 V. Moreover, an annealing process of the dielectric layer and the final MIM capacitor at 90 °C during 15 h brings a significant decrease of the leakage current by three decades from mA cm<jats:sup>−2</jats:sup> to µA cm<jats:sup>−2</jats:sup>.</jats:p></jats:sec> Ba<sub>0.6</sub>Sr<sub>0.4</sub>TiO<sub>3</sub> Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors physica status solidi (a) |
| spellingShingle | Tetsi, Emmanuel, Philippot, Gilles, Bord Majek, Isabelle, Aymonier, Cyril, Audet, Jean, Lemire, Roxan, Bechou, Laurent, Drouin, Dominique, physica status solidi (a), Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors, Materials Chemistry, Electrical and Electronic Engineering, Surfaces, Coatings and Films, Surfaces and Interfaces, Condensed Matter Physics, Electronic, Optical and Magnetic Materials |
| title | Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors |
| title_full | Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors |
| title_fullStr | Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors |
| title_full_unstemmed | Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors |
| title_short | Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors |
| title_sort | ba<sub>0.6</sub>sr<sub>0.4</sub>tio<sub>3</sub> thin films deposited by spray coating for high capacitance density capacitors |
| title_unstemmed | Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors |
| topic | Materials Chemistry, Electrical and Electronic Engineering, Surfaces, Coatings and Films, Surfaces and Interfaces, Condensed Matter Physics, Electronic, Optical and Magnetic Materials |
| url | http://dx.doi.org/10.1002/pssa.201800478 |