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Effect of Ion Beam Mixing and Compound Formation on Sputter Depth Profile of a Ta/Si Multilayer Thin Film
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Journal Title: | Surface and Interface Analysis |
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Authors and Corporations: | |
In: | Surface and Interface Analysis, 24, 1996, 6, p. 416-418 |
Type of Resource: | E-Article |
Language: | English |
published: |
Wiley
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Subjects: |