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A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts
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Zeitschriftentitel: | Journal of Physics: Conference Series |
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Personen und Körperschaften: | , , , , , , , |
In: | Journal of Physics: Conference Series, 1326, 2019, S. 012002 |
Format: | E-Article |
Sprache: | Unbestimmt |
veröffentlicht: |
IOP Publishing
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Schlagwörter: |
author_facet |
Rogachev, I A Meshkov, O I Tsatsylnikov, A F Lyndin, V V Zavarin, E E Vakina, D A Kurochka, A S Ganin, A N Rogachev, I A Meshkov, O I Tsatsylnikov, A F Lyndin, V V Zavarin, E E Vakina, D A Kurochka, A S Ganin, A N |
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author |
Rogachev, I A Meshkov, O I Tsatsylnikov, A F Lyndin, V V Zavarin, E E Vakina, D A Kurochka, A S Ganin, A N |
spellingShingle |
Rogachev, I A Meshkov, O I Tsatsylnikov, A F Lyndin, V V Zavarin, E E Vakina, D A Kurochka, A S Ganin, A N Journal of Physics: Conference Series A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts General Physics and Astronomy |
author_sort |
rogachev, i a |
spelling |
Rogachev, I A Meshkov, O I Tsatsylnikov, A F Lyndin, V V Zavarin, E E Vakina, D A Kurochka, A S Ganin, A N 1742-6588 1742-6596 IOP Publishing General Physics and Astronomy http://dx.doi.org/10.1088/1742-6596/1326/1/012002 A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts Journal of Physics: Conference Series |
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10.1088/1742-6596/1326/1/012002 |
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IOP Publishing |
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Journal of Physics: Conference Series |
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title |
A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts |
title_unstemmed |
A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts |
title_full |
A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts |
title_fullStr |
A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts |
title_full_unstemmed |
A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts |
title_short |
A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts |
title_sort |
a fabrication of algan / aln / gan hemt without annealing of ohmic contacts |
topic |
General Physics and Astronomy |
url |
http://dx.doi.org/10.1088/1742-6596/1326/1/012002 |
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2019 |
physical |
012002 |
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author | Rogachev, I A, Meshkov, O I, Tsatsylnikov, A F, Lyndin, V V, Zavarin, E E, Vakina, D A, Kurochka, A S, Ganin, A N |
author_facet | Rogachev, I A, Meshkov, O I, Tsatsylnikov, A F, Lyndin, V V, Zavarin, E E, Vakina, D A, Kurochka, A S, Ganin, A N, Rogachev, I A, Meshkov, O I, Tsatsylnikov, A F, Lyndin, V V, Zavarin, E E, Vakina, D A, Kurochka, A S, Ganin, A N |
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container_title | Journal of Physics: Conference Series |
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imprint_str_mv | IOP Publishing, 2019 |
institution | DE-Gla1, DE-Zi4, DE-15, DE-Pl11, DE-Rs1, DE-105, DE-14, DE-Ch1, DE-L229, DE-D275, DE-Bn3, DE-Brt1, DE-Zwi2, DE-D161 |
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publishDate | 2019 |
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series | Journal of Physics: Conference Series |
source_id | 49 |
spelling | Rogachev, I A Meshkov, O I Tsatsylnikov, A F Lyndin, V V Zavarin, E E Vakina, D A Kurochka, A S Ganin, A N 1742-6588 1742-6596 IOP Publishing General Physics and Astronomy http://dx.doi.org/10.1088/1742-6596/1326/1/012002 A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts Journal of Physics: Conference Series |
spellingShingle | Rogachev, I A, Meshkov, O I, Tsatsylnikov, A F, Lyndin, V V, Zavarin, E E, Vakina, D A, Kurochka, A S, Ganin, A N, Journal of Physics: Conference Series, A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts, General Physics and Astronomy |
title | A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts |
title_full | A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts |
title_fullStr | A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts |
title_full_unstemmed | A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts |
title_short | A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts |
title_sort | a fabrication of algan / aln / gan hemt without annealing of ohmic contacts |
title_unstemmed | A fabrication of AlGaN / AlN / GaN HEMT without annealing of ohmic contacts |
topic | General Physics and Astronomy |
url | http://dx.doi.org/10.1088/1742-6596/1326/1/012002 |