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Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration
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Journal Title: | Journal of Physics D: Applied Physics |
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Authors and Corporations: | , |
In: | Journal of Physics D: Applied Physics, 24, 1991, 6, p. 865-881 |
Type of Resource: | E-Article |
Language: | Undetermined |
published: |
IOP Publishing
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Subjects: |