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Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration
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| Zeitschriftentitel: | Journal of Physics D: Applied Physics |
|---|---|
| Personen und Körperschaften: | , |
| In: | Journal of Physics D: Applied Physics, 24, 1991, 6, S. 865-881 |
| Format: | E-Article |
| Sprache: | Unbestimmt |
| veröffentlicht: |
IOP Publishing
|
| Schlagwörter: |
| author_facet |
Bohm, C Perrin, J Bohm, C Perrin, J |
|---|---|
| author |
Bohm, C Perrin, J |
| spellingShingle |
Bohm, C Perrin, J Journal of Physics D: Applied Physics Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration Surfaces, Coatings and Films Acoustics and Ultrasonics Condensed Matter Physics Electronic, Optical and Magnetic Materials |
| author_sort |
bohm, c |
| spelling |
Bohm, C Perrin, J 0022-3727 1361-6463 IOP Publishing Surfaces, Coatings and Films Acoustics and Ultrasonics Condensed Matter Physics Electronic, Optical and Magnetic Materials http://dx.doi.org/10.1088/0022-3727/24/6/011 Spatially resolved optical emission and electrical properties of SiH<sub>4</sub>RF discharges at 13.56 MHz in a symmetric parallel-plate configuration Journal of Physics D: Applied Physics |
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IOP Publishing, 1991 |
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IOP Publishing, 1991 |
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0022-3727 1361-6463 |
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0022-3727 1361-6463 |
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1991 |
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IOP Publishing |
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Journal of Physics D: Applied Physics |
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49 |
| title |
Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration |
| title_unstemmed |
Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration |
| title_full |
Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration |
| title_fullStr |
Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration |
| title_full_unstemmed |
Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration |
| title_short |
Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration |
| title_sort |
spatially resolved optical emission and electrical properties of sih<sub>4</sub>rf discharges at 13.56 mhz in a symmetric parallel-plate configuration |
| topic |
Surfaces, Coatings and Films Acoustics and Ultrasonics Condensed Matter Physics Electronic, Optical and Magnetic Materials |
| url |
http://dx.doi.org/10.1088/0022-3727/24/6/011 |
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1991 |
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865-881 |
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| doi_str_mv | 10.1088/0022-3727/24/6/011 |
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| id | ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMTA4OC8wMDIyLTM3MjcvMjQvNi8wMTE |
| imprint | IOP Publishing, 1991 |
| imprint_str_mv | IOP Publishing, 1991 |
| institution | DE-D275, DE-Bn3, DE-Brt1, DE-D161, DE-Gla1, DE-Zi4, DE-15, DE-Pl11, DE-Rs1, DE-105, DE-14, DE-Ch1, DE-L229 |
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| physical | 865-881 |
| publishDate | 1991 |
| publishDateSort | 1991 |
| publisher | IOP Publishing |
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| recordtype | ai |
| series | Journal of Physics D: Applied Physics |
| source_id | 49 |
| spelling | Bohm, C Perrin, J 0022-3727 1361-6463 IOP Publishing Surfaces, Coatings and Films Acoustics and Ultrasonics Condensed Matter Physics Electronic, Optical and Magnetic Materials http://dx.doi.org/10.1088/0022-3727/24/6/011 Spatially resolved optical emission and electrical properties of SiH<sub>4</sub>RF discharges at 13.56 MHz in a symmetric parallel-plate configuration Journal of Physics D: Applied Physics |
| spellingShingle | Bohm, C, Perrin, J, Journal of Physics D: Applied Physics, Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration, Surfaces, Coatings and Films, Acoustics and Ultrasonics, Condensed Matter Physics, Electronic, Optical and Magnetic Materials |
| title | Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration |
| title_full | Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration |
| title_fullStr | Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration |
| title_full_unstemmed | Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration |
| title_short | Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration |
| title_sort | spatially resolved optical emission and electrical properties of sih<sub>4</sub>rf discharges at 13.56 mhz in a symmetric parallel-plate configuration |
| title_unstemmed | Spatially resolved optical emission and electrical properties of SiH4RF discharges at 13.56 MHz in a symmetric parallel-plate configuration |
| topic | Surfaces, Coatings and Films, Acoustics and Ultrasonics, Condensed Matter Physics, Electronic, Optical and Magnetic Materials |
| url | http://dx.doi.org/10.1088/0022-3727/24/6/011 |