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Synthesis of β- and α-FeSi2 phases by Fe ion implantation into Si using metal vapor vacuum arc ion source
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Journal Title: | Journal of Applied Physics |
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Authors and Corporations: | , , , , |
In: | Journal of Applied Physics, 75, 1994, 8, p. 3847-3854 |
Type of Resource: | E-Article |
Language: | English |
published: |
AIP Publishing
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Subjects: |