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Fabrication of Nanopillar Micropatterns by Hybrid Mask Lithography for Surface-Directed Liquid Flow
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Journal Title: | Micromachines |
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Authors and Corporations: | , , |
In: | Micromachines, 4, 2013, 2, p. 232-242 |
Type of Resource: | E-Article |
Language: | English |
published: |
MDPI AG
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Subjects: |