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Turbomolecular Pump
Holdings
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Turbomolecular Pump
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Bibliographic Details
Journal Title:
Shinku
Authors and Corporations:
ODAKA, Kenji
In:
Shinku
, 49, 2006, 8, p. 466-469
Type of Resource:
E-Article
Language:
Undetermined
published:
The Vacuum Society of Japan
Subjects:
Electrical and Electronic Engineering
Surfaces, Coatings and Films
Condensed Matter Physics
Holdings
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Internet
http://dx.doi.org/10.3131/jvsj.49.466
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