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A theoretical investigation on the chemical bonding of interstitial and vacancy defects in silicon during their migration
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Zeitschriftentitel: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
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Personen und Körperschaften: | , , |
In: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 127-128, 1997, S. 235-238 |
Format: | E-Article |
Sprache: | Englisch |
veröffentlicht: |
Elsevier BV
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Schlagwörter: |