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The impact of the heat generation of the primary scanning beam on the SEM-EBIC characteristics
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Journal Title: | physica status solidi (a) |
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Authors and Corporations: | |
In: | physica status solidi (a), 88, 1985, 2, p. 663-672 |
Type of Resource: | E-Article |
Language: | German |
published: |
Wiley
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Subjects: |