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by Utermohlen, Fabian, Etter, Daniel B., Borowsky, David, Herrmann, Ingo, Schelling, Christoph, Hutter, Franz X., Shen Hue Sun, Burghartz, Joachim N.
Published in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (2014)
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Published in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (2014)
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8
by Schulze Spuentrup, Jan Dirk, Burghartz, Joachim, Graf, Heinz-Gerd, Harendt, Christine, Hutter, Franz, Nicke, Markus, Schmidt, Uwe, Schubert, Markus, Sterzel, Juergen
Published in Sensors (2008)
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Published in Sensors (2008)
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