Hochschule Zittau Görlitz

Low-cost microbolometer with nano-scaled plasmonic absorbers for far infrared thermal imaging applications

by Utermohlen, Fabian, Etter, Daniel B., Borowsky, David, Herrmann, Ingo, Schelling, Christoph, Hutter, Franz X., Shen Hue Sun, Burghartz, Joachim N.
Published in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (2014)